Nanocapacitive circuit elements.

نویسندگان

  • Hadi M Zareie
  • Scott W Morgan
  • Matthew Moghaddam
  • Abbas I Maaroof
  • Michael B Cortie
  • Matthew R Phillips
چکیده

"Natural" lithography was used to prepare arrays of nanoscale capacitors on silicon. The capacitance was verified by a novel technique based on the interaction of a charged substrate with the electron beam of a scanning electron microscope. The "nanocapacitors" possessed a capacitance of approximately 1 x 10(-16) F and were observed to hold charge for over an hour. Our results indicate that fabricating nanostructures using natural lithography may provide a viable alternative for future nanoelectronic devices.

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عنوان ژورنال:
  • ACS nano

دوره 2 8  شماره 

صفحات  -

تاریخ انتشار 2008